Complete systems
The
complete system will be built according
to customers requirements.
Displacement can be from 50 mm
up to some hundred millimeter
in X as well as in Y direction.
Technical
Data Complete System
Displacement
[mm]
50 x 50 mm up to 300 x 300 mm
Repeatability
[µm]
0.5
Hysteresis
[µm]
< 3 µm
Straightness error over 10mm
[µm]
< 0.2
Straightness error over 50mm
[µm]
< 0.5
Max. speed.
[mm/sec]
50
Resolution
[µm]
0.5
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