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Complete systems

The complete system will be built according
to customers requirements.
Displacement can be from 50 mm
up to some hundred millimeter
in X as well as in Y direction.

 

 

 

 

 

 

 

 

 

 

Technical Data Complete System

Displacement                                  [mm]              50 x 50 mm up to 300 x 300 mm
Repeatability                                    [µm]               0.5
Hysteresis                                       [µm]               < 3 µm
Straightness error over 10mm            [µm]               < 0.2
Straightness error over 50mm            [µm]               < 0.5
Max. speed.                                [mm/sec]             50
Resolution                                       [µm]                0.5

 

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